Piezoresistive silicon micro-accelerometer has fast response,high sensitivity,high precision and could be miniaturized easily,especially it is in good low frequency response and can work under strong radiation.In recent years,it develops rapidly,and has a broad application prospects in industrial automatic control,automotive,seismic surveys,military and space systems,medical and biological engineering and other fields.In practical engineering applications,it often requires both
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Mine collapse is one of the common natural disasters in the engineering geologicalproblems, support was damaged or aged will lead to the occurrence of collapse. Themineral resources of China is very rich, especially in the west and southwest of China,large and small mining sites are everywhere, with the extraction is increasing, the scale ofmining is
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With the development of wireless telecommunication, the system is advancing to be small, integrated and low power consumption. As a radio frequency device with excellent performance, Film Bulk Acoustic Resonator has the advantages of small size, high Q value, high working frequency, high power-handling capacity and the compatibility with semiconductor process. Compared with the traditional
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In the industry of plastic film manufacturing, the thickness is the most important physical indicators. The uniformity of film thickness is related to the performance of the product, grading rate, prices and benefits.Uneven thickness influence the product quality directly.For example, the packaging film(POF), such as packaging films for tableware, are more prone to rupture in
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With the development of information science and electronic technology, electronic equipment has in-depth impact of production and lifestyle of human beings, which has become an essential part of modern society. All electronic devices need energy. For their high efficiency, DC-DC switching power management chips become an integral part of electronic equipment, especially in pursuit of
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In recent years, with the rapid development and progress of infrared technology, infrared imaging system, which is widely used in military and civilian areas, has become the research focus in every country. As the main components of the infrared imaging system, infrared optical system is used to collecting the infrared radiation imaged in the photosensitive
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The rapid development of modern electronic technology makes quartz crystal oscillators widely applied in electronic equipments such as communication,navigation,radar,measure instruments etc.Many devices work in the environment which the temperature changes in a larger range, the change of temperature will cause the crystal oscillator’s frequency shift. In this case, the crystal oscillat or can not provide
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In recent years, with the development of social economy, cars are more and more popular in big cities. And the lack of public parking space has become obviously. At the present stage, the management system which adopted by most parking lots in China realize the function of automatic billing and charge just by managing the
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This thesis focuses on the new fabrication based on the MEMS technology and the new pixel design of uncooled infrared imaging devices with reflecting optically readout for 8～14μm IR wave band.As for the device fabrication,this thesis gives a method based on Liftoff technology to reduce the inclination of mirror and improve its flatness,meanwhile,this method does
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Along with the people’s recognition to the environmental protection the analysis of water quality is also one part that the people pay attention to gradually。So there are more requests to the checking equipment–pH meter. Because of being confined by the electronics technique and manufacture craft, the pH examination instrument is hard to be small,to be
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